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Fabrication of three-dimensional GaAs antireflective structures by metal-assisted chemical etching

Materials ScienceElectrical EngineeringEngineeringNanoelectronicsMetal-assisted Chemical EtchingApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxyMicroelectronicsPlasma EtchingOptoelectronicsCompound Semiconductor