AFM Study of Multilayer Sol-gel BaxSr1-xTiO3 Thin Films

Abstract

Multilayer Barium Strontium Titanate (BST) sol-gel films with molar formula BaxSr1-xTiO3 (x = 0.5, 0.7 and 0.8) are deposited on SiO2/Si substrates. The surface morphology and grain size are characterized via Atomic Force Microscope (AFM), showing the films to be uniform and crack-free