Development of a Field Emission Electron Microscope

Abstract

A field emission electron microscope with highly stabilized gun and illuminating system was developed. Several experiments were made to demonstrate the high performance of the microscope. The brightness of the beam was more than that of the conventional ones, which feature was demonstrated by taking 300 Fresnel fringes and 3,000 bi-prism fringes. Furthermore, monochromatic feature of the microscope makes the effect of chromatic aberration smaller and the half-spacing fringes of nickel {220} planes (1/2 d220=62Å) were observed.