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An atomistic simulation investigation on chip related phenomena in nanometric cutting of single crystal silicon at elevated temperatures

Materials ScienceSingle Crystal SiliconAtomistic Simulation InvestigationEngineeringWafer Scale ProcessingMicrofabricationNanometric CuttingApplied PhysicsNanoscale ModelingSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsSilicon Debugging