Concepedia

Publication | Closed Access

Highly reliable silicon micromachined physical sensors in mass production

DOI

27

Citations

2

References

1996

Year

Takao Sasayama, Seikoo Suzuki, Shigeki Tsuchitani, Akira Koide, Masayoshi Suzuki, T. Nakazawa, Norio Ichikawa
Sensors and Actuators A Physical

References

YearCitations

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