Concepedia

Highly reliable silicon micromachined physical sensors in mass production

Takao Sasayama, Seikoo Suzuki, Shigeki Tsuchitani, Akira Koide, Masayoshi Suzuki, Norio Ichikawa

Sensors and Actuators A Physical · 1996 · 27 citations · 2 references

Concepts

EngineeringElectrical EngineeringMaterials EngineeringMicroelectromechanical SystemsMicroelectronicsSensorsDevice ReliabilityMems FabricationMems ReliabilityMicroelectromechanical SensorsMicrofabrication ProcessesMicromachiningMass SensingMass SensorsMicroelectromechanical System FabricationMicrofabricated SensorsMicromachined SensorsMicromachining Of Silicon WafersSilicon Micromachining

References

2

Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

S. Suzuki, Shigeki Tuchitani, Katsuhiro Satō et al. · Sensors and Actuators A Physical · 1990 · 60 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Semiconductor Capacitance-Type Accelerometer with PWM Electrostatic Servo Technique

Seiko Suzuki, Shigeki Tuchitani, Kazuo Sato et al. · SAE technical papers on CD-ROM/SAE technical paper series · 1991 · 14 citations

Engineering, Electrical Engineering, Mechanical Engineering +14