Publication | Closed Access
Absolute Calibration Of An Optical Flat
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1984
Year
Sensor CalibrationEngineeringMeasurementCalibrationOptical PropertiesOptic DesignOptical TestingInterferometryZernike PolynomialsEducationCamera CalibrationOptical System AlignmentInstrumentationQuality MetricsAbsolute CalibrationOptical TolerancingFlat Optical Surface
A method for the absolute calibration of a flat optical surface is described. An algorithm which utilizes the orthogonal properties of the Zernike polynomials was used on interferometric data to fabricate and certify three 10-inch Zerodur reference flats to X/100 peak-to-valley quality.