Optical Engineering · 1984 · 146 citations · 0 references
EngineeringPhysicsMetrologyOpticsCalibrationEquipment CalibrationForm MeasurementInterferometryOptical MetrologySurface MetrologyAbsolute CalibrationCalibration Of Optical InstrumentsFlatness MeasurementInterferometric InstrumentationOptical Form MetrologyOptical InterferometryZernike Polynomials
A method for the absolute calibration of a flat optical surface is described. An algorithm which utilizes the orthogonal properties of the Zernike polynomials was used on interferometric data to fabricate and certify three 10-inch Zerodur reference flats to X/100 peak-to-valley quality.