A flexoelectric microelectromechanical system on silicon - Concepedia

Concepedia

Publication | Open Access

A flexoelectric microelectromechanical system on silicon

DOI Full Paper Access

341

Citations

23

References

2015

Year

Umesh Kumar Bhaskar, Nirupam Banerjee, Amir Abdollahi, Zhe Wang, Darrell G. Schlom, Guus Rijnders, Gustau Catalán

Nature Nanotechnology

Electrical EngineeringEngineeringMicrofabricationNano Electro Mechanical SystemMicroelectromechanical SystemsMicroactuatorMicroelectronicsMicro-electromechanical SystemFlexoelectric Microelectromechanical System

References

	Year	Citations

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