Journal of Materials Processing Technology · 2008 · 140 citations · 12 references
EngineeringManufacturing EngineeringMaterials EngineeringMicrofabricationSurface EngineeringTribologyLubricant PropertiesLubricant RheologyLubrication EngineeringMicrofabrication MaterialsSurface RoughnessThin-film PatterningDie Wall FrictionLubricant Film FormationLubricant Film ThicknessLubricating MaterialsSurface Condition Effects
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