Low temperature PECVD SiNx films applied in OLED packaging

Weidong Huang, Xuhong Wang, Sheng Mei, Liqiang Xu, Frank Stubhan, Le Luo, Tao Feng, Xi Wang, Fumin Zhang, Shichang Zou

Materials Science and Engineering B · 2003 · 97 citations · 16 references

Concepts

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