Concepedia

In Situ Etching of SiC Wafers in a CVD System Using Oxygen as the Source

Rong Jun Wang, I. Bhat, T. Paul Chow

Materials science forum · 2002 · 10 citations · 0 references

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Concepts

Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSurface ScienceChemical Vapor DepositionEtching ProcessesPhysical Vapor DepositionSemiconductor Device MaterialsSurface OxidationThin Film EtchingEtch ChemistryEtchingSilicon Carbide (Sic) MaterialsSilicon EtchingSilicon Wafer ProcessingSilicon WafersSurface Etching