Publication | Closed Access
Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer
23
Citations
19
References
2006
Year
Materials Science3D Ic ArchitectureElectrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationNanoelectronicsApplied PhysicsSoi WaferElectronic PackagingMicroelectronics3D Printing
| Year | Citations | |
|---|---|---|
Page 1
Page 1