Fabrication and packaging of inertia micro-switch using low-temperature photo-resist molded metal-electroplating technology - Concepedia

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Fabrication and packaging of inertia micro-switch using low-temperature photo-resist molded metal-electroplating technology

31

Citations

6

References

2003

Year

Wei Ma, Gang Li, Yitshak Zohar, Man Wong

Sensors and Actuators A Physical

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringLow-temperature Photo-resistMicrofabricationMetal-electroplating TechnologyMicroactuatorElectronic PackagingMicro-optical ComponentMicroelectronics3D PrintingMicro-electromechanical System

References

	Year	Citations

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