Microsystem Technologies · 2010 · 16 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsSemiconductor PhysicsSemiconductor Thin FilmsSilicon MaterialsThin Film Electrical PropertiesThin Film StrainThin-film MaterialsPiezoresistive MaterialsSemiconductor Strain GaugesThin-film Strain Gauges
6
Mechanics of Materials (2nd Ed.)
James M. Gere, S. Timoshenko, H. Saunders · Journal of vibration and acoustics · 1986 · 276 citations · Full text
A silicon piezoresistive pressure sensor
R. P. Singh, Low Lee Ngo, Ho Soon Seng et al. · 2003 · 49 citations
Engineering, Electrical Engineering, Mechanical Engineering +16