10-Gb/s all-silicon optical receiver

Abstract

We report an all-silicon optical receiver operating at 10 Gb/s. The lateral p-i-n photodiodes were fabricated using standard 130-nm complementary metal-oxide-semiconductor technology on silicon-on-insulator substrate. A sensitivity of -6.9dBm (bit error ratio <10/sup -9/) at 10 Gb/s was achieved.