On-wafer high-frequency measurement improvements

Abstract

As the size of advanced BJT or MOSFET devices shrink, very high frequency measurements are required to enable accurate circuit simulations. In order to conduct successfully high frequency measurements, efficient calibration and accurate de-embedding procedures must be followed as well as proper employment of the network analyzer. In this work, a new de-embedding procedure which takes into account propagation effects is proposed. Results are presented and compared to those obtained with other techniques. Errors due to an improper use of the network analyzer are also looked into and, subsequently, a general solution scheme is given.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>