Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 23 citations · 0 references
Cnt E-gunElectrical EngineeringEngineeringPhysicsElectron SpectroscopyNanoelectronicsApplied PhysicsPatterned Carbon NanotubeRtof MsInstrumentationElectronic InstrumentationMicroelectronicsCarbon NanotubesParticle AcceleratorElectron Optic
A cold cathode field emission electron gun (e-gun) based on a patterned carbon nanotube (CNT) film has been fabricated for use in a miniaturized reflectron time-of-flight mass spectrometer (RTOF MS), with future applications in other charged particle spectrometers, and performance of the CNT e-gun has been evaluated. A thermionic electron gun has also been fabricated and evaluated in parallel and its performance is used as a benchmark in the evaluation of our CNT e-gun. Implications for future improvements and integration into the RTOF MS are discussed.