High speed performance of 2-D vertical-cavity laser diode arrays

Abstract

We have fabricated and tested 10×10 independently addressable vertical-cavity surface-emitting laser diode arrays. Arrays with 55 μm active diameter devices show an average threshold current density of 590 A/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and an excellent homogeneity of the output characteristics over the full array size with maximum CW output powers of 12 mW. Broad area laser diodes with active diameters of 75 μm reach output powers of 18 mW for CW operation and 180 mW under pulsed conditions. Small-signal modulation bandwidths are beyond 10 and 8 GHz for the 55 and 75 μm devices, respectively.