EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationSensorsBulk MicromachiningMems FabricationMems TestingMicroelectromechanical SensorsMicromachiningPressure SensorsMechanical Testing Of Mems DevicesMems Sensor TestingMicroelectromechanical Pressure SensorsMicromachined SensorsPiezoresistive Pressure SensingPiezoresistive Pressure Sensors
Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
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