Diamond and Related Materials · 1997 · 14 citations · 4 references
Natural SciencesMaterials EngineeringPhysicsPlasma PhysicsChemical Vapor DepositionHigh-temperature PlasmasPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsPlasma-wall InteractionsAtmospheric Pressure Plasma TreatmentAtmospheric-pressure PlasmasDeposition RateDeposition Rate ControlDeposition Rate EffectsPlasma ProcessesPlasma-enhanced Deposition
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