Designing Cofired Multilayer Electrostrictive Actuators for Reliability

Abstract

Multilayer electrostrictive actuators are large capacitors with the added complexity of having to perform mechanically as well as electrically. High operating fields and severe operating conditions make it necessary to predict and limit stress levels generated in the device. A constitutive three‐dimensional model for electrostrictors has been developed and implemented as a design tool for actuators. The effects of electrode geometry and transition‐layer thickness on stress levels have been modeled and failure in high‐stress regions has been correlated with the presence of flaws (pores and delaminations) in the devices. [Key words: capacitors, electrical properties, stress, multilayer, modeling.]