Kinetics of Indium Phosphide Epitaxial Growth Using Metal Organic Precursors

Abstract

Abstract The deposition kinetics of InP using metal‐organic precursors is presented. The proposed chemical mechanism involves both gas phase and surface reactions. The fundamental hypothesis adopted in deriving the mechanism was a dual site dissociative adsorption of the precursors on the growing surface. In any case, all the rate constants either were taken from the literature or estimated through thermochemical methods. In addition, the deposition reactor was simulated by means of a monodimensional model that accounts for the main reactor features through the boundary layer theory.