ICP dry etching of ZnO and effects of hydrogen

K. Ip, M. E. Overberg, K. W. Baik, R. G. Wilson, S. O. Kucheyev, J. S. Williams, C. Jagadish, F. Ren, Young-Woo Heo, D. P. Norton,

Solid-State Electronics · 2003 · 18 citations · 35 references

Concepts

References

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