Tactile Microgripper For Automated Handling Of Microparts

Abstract

Abstract As a part of a microrobot we present a micromachined gripper system which has both sensor and actuator integrated. The actuation principle is based on the bimetallic effect. Measurements show that the actuator has a linear range up to 140 μm tip deflection, which corresponds to an operating power of 80 mW. The response time is about 0.01 s. The sensor is constructed as a piezoresistive Wheatstone bridge and shows a sensitivity of 33 mV mN−1 V−1.