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An experimental study on high-temperature metallization for micro-hotplate-based integrated gas sensors

Materials ScienceEngineeringThermal EngineeringLiquid Metal CoolingMicrofabricationGas SensorExperimental StudyElectronic PackagingInstrumentationMicrofluidicsHeat TransferHigh-temperature MetallizationThermal SensorElectrochemical Gas SensorMicrostructureMicroelectronics