Analytical modeling for determination of pull-in voltage for an electrostatic actuated MEMS cantilever beam

Abstract

A new analytical model has been developed for determining the pull-in voltage of an electrostatic actuated microelectromechanical system (MEMS) cantilever beam. The model takes into account the beam curvature caused by residual stress or stress gradient in the beam material. It can be used to model straight, curled and beam with mixture of straight and curled sections. Modeling result has been compared with published work of other researchers as well as with experimental measurement of this work and is found to be accurate.