Measurement and interpretation of stress in copper films as a function of thermal history

Constitutive Equations in Plasticity

A. S. Argon, C.S. Hartley · Journal of Applied Mechanics · 1977 · 969 citations

Natural Sciences, Materials Engineering, Mathematics +12

Measurement and Interpretation of stress in aluminum-based metallization as a function of thermal history

P. A. Flinn, Donald S. Gardner, William D. Nix · IEEE Transactions on Electron Devices · 1987 · 586 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thin-films -- Stresses and mechanical properties 7

R. C. Cammarata, M. Nastasi, Esteban P. Busso et al. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1998 · 168 citations

Natural Sciences, Materials Engineering, Materials Science +16

X-ray diffraction determination of the effect of various passivations on stress in metal films and patterned lines

Paul A. Flinn, Chien Chiang · Journal of Applied Physics · 1990 · 167 citations

Natural Sciences, Materials Engineering, Materials Science +17

Mechanical stress as a function of temperature for aluminum alloy films

Donald S. Gardner, Paul A. Flinn · Journal of Applied Physics · 1990 · 100 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17