Thin-film microstrip lines for MM and sub-MM/wave on-chip interconnects

Abstract

Thin-film microstrip lines with a polymer dielectric between ground and signal conductor are proven to be an attractive alternative to coplanar waveguides for (sub)-MM-wave interconnects. Both simulation and electrooptic characterization reveal negligible modal dispersion up to 1000 GHz and low attenuation even if the lines are realized on low-resistivity substrates.