Vertical-cavity surface-emitting laser diodes with post-growth wavelength adjustment

Abstract

A novel vertical-cavity surface-emitting laser design enables the post-growth determination of the emission wavelength. The lasers employ a hybrid top mirror consisting of a semiconductor Bragg mirror and a metal reflector. The laser cavity length of each element in a 2-D array can be precisely adjusted after epitaxial growth by anodic oxidation and etching. An emission wavelength range of 25 nm is experimentally observed. Lasers operate under continuous wave conditions with threshold currents of about 6 mA and output powers up to 0.5 mW.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>