Publication | Closed Access
Dependency of dishing on polish time and slurry chemistry in Cu CMP
63
Citations
4
References
2000
Year
Materials EngineeringMaterials ScienceChemical EngineeringEngineeringMaterial ProcessingCorrosionCu CmpPolish TimeMetallurgical ProcessChemistrySlurry ChemistryMetallurgical SystemMineral ProcessingMicrostructureMetal Processing
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