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Doping, vacuum annealing, and thickness effect on the physical properties of zinc oxide films deposited by spray pyrolysis

Materials EngineeringMaterials ScienceEngineeringNanotechnologyOxide ElectronicsApplied PhysicsThin FilmsPhysical PropertiesChemical DepositionChemical Vapor DepositionThin Film ProcessingVacuum AnnealingThickness Effect