Theoretical and experimental study of mass sensitivity of PSAW-APMs on ZX-LiNbO/sub 3/

Abstract

Acoustic plate mode (APM) devices have recently been used as sensing elements, both for the physical measurement of fluid properties and in biosensor applications. One of the primary interaction mechanisms in these devices is mass loading caused by the added mass bound to the layered crystal surface. However, the material properties of these thin composite layers are not well characterized or known as is required in order to accurately predict the sensor response. In the present work, perturbation theory is used to derive expressions for the sensitivity of the APM sensors to mass loading and viscoelastic stiffening. Mass sensitivity experiment was conducted on ZX-LiNbO/sub 3/ in a liquid environment to accurately reflect the sensitivity of an actual biosensor and the results are compared to theory. The measured data show a f/sup 2/ dependence for the mass sensitivity for APMs on ZX-LiNbO/sub 3/ in the measured frequency range, which indicates a SAW-like behavior. This behavior is due to the fact that the acoustic plate modes on ZX-LiNBO/sub 3/ are pseudo-SAW (PSAW) derived, and the acoustic energy is confined to the sensing surface. As a result, the APMs on ZX-LiNbO/sub 3/ are referred to as PSAW-APMs. Discussions are given in terms of the added mass which occurs in typical biosensor applications.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>