Integrated four-channel Mach-Zehnder multi/demultiplexer fabricated with phosphorous doped SiO/sub 2/ waveguides on Si

Abstract

An analysis and the device performance of an integrated optical 4-channel multi/demultiplexer based on Mach-Zehnder interferometers elements are presented. The channel spacing is 77 AA. Single-mode channel waveguides are made from P-doped SiO/sub 2/ core layers. Waveguide losses as low as 0.05 dB/cm and fiber-to-waveguide butt coupling as low as 0.5 dB for lambda =1.5 mu m have been obtained. The multiplexer transfers power from four input channels into a common output channel with an average fiber-to-fiber loss of 2.6 dB per channel. The average crosstalk of the demultiplexer is -16 dB.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>