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Plasma deposition of thin film silicon: kinetics monitored by optical emission spectroscopy

Materials ScienceOptical MaterialsPlasma DepositionEngineeringOptical PropertiesSurface ScienceApplied PhysicsOptical Emission SpectroscopyThin Film Process TechnologyThin FilmsChemical Vapor DepositionPlasma ProcessingOptoelectronicsThin Film SiliconSilicon On InsulatorThin Film Processing