Publication | Closed Access
Surface Studies for Quartz Resonators
27
Citations
10
References
1974
Year
Unknown Venue
Materials ScienceSurface CharacterizationChemical EngineeringUltraviolet RadiationEngineeringElectron MicroscopyMicrofabricationSurface AnalysisSurface ScienceApplied PhysicsSurface TreatmentQuartz ResonatorsVacuum DeviceDynamic MetamaterialsSurface Processing
Abstract : Cleaning procedures for quartz resonators have been studied by Auger electron spectroscopy. The merits of cleaning by chemical methods, ion bombardment, ultraviolet radiation, and electron beam irradiation are discussed. Of all, irradiation by intense, short wave-length ultraviolet light is the simplest and most promising cleaning procedure. It can be used in ambient air as well as in a vacuum system. Parts stored in UV light apparently maintain their cleanness indefinitely; however, the oxidation of oxide forming metals is greatly accelerated by the process. The recontamination of resonators exposed to air is also discussed. The surface topographies and crystalline structures of polished quartz blanks, and of lapped blanks etched for various times, have been investigated by scanning electron microscopy (SEM) and reflection high energy electron diffraction (RHEED). The surface damage produced by polishing and lapping is discussed in terms of the SEM micrographs and RHEED patterns. The results for Lapped and etched surfaces are compared with the minimum etched specified by MIL-C-3098F. (Author)
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