Concepedia

Stability of the Silicon Yttrium Oxynitrides

R. R. Wills, Jeffrey A. Cunningham, J. M. Wimmer, R. W. STEWART

Journal of the American Ceramic Society · 1976 · 32 citations · 1 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceInorganic ChemistryMaterials ChemistrySemiconductor MaterialsSemiconductor Device MaterialsSilicon MaterialsOxynitride CeramicsSemiconductor StabilitySilicon Chemistry

References

1

Silicon Yttrium Oxynitrides

R. R. Wills · Journal of the American Ceramic Society · 1974 · 21 citations