Design of a gain scheduled PID controller for the precision stage in lithography

Research on gain scheduling

Wilson J. Rugh, Jeff S. Shamma · Automatica · 2000 · 1.8K citations

Business, Industrial Engineering, Operations Research +6

Analysis of gain scheduled control for nonlinear plants

Jeff S. Shamma, Michael Athans · IEEE Transactions on Automatic Control · 1990 · 756 citations

Engineering, Systems Engineering, Dynamical Systems +15

High-precision magnetic levitation stage for photolithography

Won-jong Kim, David L. Trumper · Precision Engineering · 1998 · 290 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +12

Gain scheduling dynamic linear controllers for a nonlinear plant

Douglas A. Lawrence, Wilson J. Rugh · Automatica · 1995 · 235 citations · Full text

Engineering, Industrial Engineering, Optimization +13

A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Wei Gao, Shuichi Dejima, Hiroaki Yanai et al. · Precision Engineering · 2004 · 137 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +11