Publication | Closed Access
A high speed MEMS scanner for 140-kHz SS-OCT
16
Citations
3
References
2011
Year
Unknown Venue
PhotonicsElectrical EngineeringMs/frame Visualization Capability140-Khz Wavelength Tunable-laserEngineeringMicrofabricationOptical PropertiesHigh-frequency DeviceAngle Magnifier MechanismInstrumentationMicroelectronicsMicro-electromechanical SystemElectro-optics DeviceElectronic Circuit
We present an electrostatic vertical comb-drive MEMS optical scanner with the angle magnifier mechanism developed for a 140-kHz wavelength tunable-laser in the swept-source OCT system of a 2 ms/frame visualization capability.
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