Integrated wafer-scale growth and transfer of directional Carbon Nanotubes and misaligned-Carbon-Nanotube-immune logic structures

Abstract

We successfully demonstrate essential components and their integration for large-scale carbon nanotube field effect transistor (CNFET) technology: 1. First demonstration of full-wafer-scale growth of directional carbon nanotubes (CNTs) on 4" single-crystal quartz wafers. 2. First demonstration of full-wafer-scale CNT transfer from 4" quartz wafers to 4" silicon wafers for integration on silicon. 3. Integration of full-wafer-scale growth and transfer, together with metallic-CNT removal, for the first demonstration of misaligned-CNT-immune digital logic structures on a full-wafer-scale. Such logic structures guarantee correct logic functionality in the presence of a large number of misaligned and mis-positioned CNTs.