IEEE Photonics Technology Letters · 2005 · 73 citations · 9 references
EngineeringElectrical EngineeringElectronic MaterialsPhotonicsSemiconductor DevicesIntegrated Circuit DesignIntegrated Circuit DevicesIntegrated Circuit FabricationMicrowave Integrated CircuitsMicrowave Semiconductor DevicesPhotonic Integrated CircuitsEtch LagIntegrated Optical WaveguidesIntegrated Passive DevicesIntegrated WaveguidesMaskingMode ConversionReactive Ion EtchingWave Mode Conversion
The novel design and fabrication of monolithically integrated passive waveguide mode converters (WMCs), realized through the utilization of the reactive ion-etch lag (RIE Lag) phenomenon, is reported. The low-loss GaAs-AlGaAs WMCs have been characterized over a wavelength range of 900-940 nm, resulting in TE-TM (TM-TE) mode conversion with efficiencies of greater than 96% and low-loss devices with conversion lengths as short as 150 μm. The properties and characteristics of the fully integrated WMCs, fabricated with a single masking and etch process, are in agreement with theoretical predictions.
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Polarization rotation in asymmetric periodic loaded rib waveguides
Y. Shani, Thomas Koch, U. Koren et al. · Applied Physics Letters · 1991 · 139 citations
Natural Sciences, Electrical Engineering, Materials Science +16