Publication | Closed Access
Etching of anode wire deposits with CF4/isobutane (80:20) avalanches
37
Citations
10
References
1991
Year
Materials EngineeringEngineeringAnode Wire DepositsApplied PhysicsSemiconductor Device FabricationMicroelectronicsPlasma EtchingPlasma ProcessingElectrical Insulation
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