Design and fabrication of an AT-cut quartz phononic Lamb wave resonator

Abstract

This paper presents results on the design and fabrication of an AT-cut quartz Lamb wave resonator with phononic crystal (PC) reflective gratings. The deep reactive ion etching process with a laboratory-made etcher was utilized to fabricate PC structures of the AT-cut quartz Lamb wave resonator. The finite element method was adopted to calculate the PC band structure, effective reflective distance from the PC boundary and further the resonant modes and admittance of the phononic Lamb wave resonant cavity. Through the comparison studies between the experimental and simulated results, a design process for the AT-cut quartz phononic Lamb wave resonator was proposed. It is noted that by using the phononic reflectors, the size of the Lamb wave resonator can be reduced significantly.