Publication | Closed Access
A Novel Organosiloxane Vapor Annealing Process for Improving Elastic Modulus of Porous Low-k Films
16
Citations
5
References
2004
Year
Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringNanoporous MaterialSurface ScienceApplied PhysicsImproving Elastic ModulusPorous Low-k FilmsChemical Vapor DepositionThin Film Processing
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