High-finesse laterally coupled organic-inorganic hybrid polymer microring resonators for VLSI photonics

Abstract

We produced laterally coupled optical microring resonators having high finesse (F/spl sime/17 at 1.5-μm wavelength) using a two-step patterning technique based on optical photolithography. The technique used allows us to separately control the height of both ring and port waveguides and structure submicrometer gaps. The resonance spectrum of microrings with radii of 50 μm made of an organic-inorganic hybrid polymer have an extinction ratio of about 12 dB and a filter bandwidth /spl delta//spl lambda//spl sime/0.28 nm (full-width at half-maximum) at a wavelength /spl lambda/=1547.78 nm. We show that the resonances can be thermooptically tuned by 0.2 nm//spl deg/C, thus allowing us to modulate the transmission of the through port signal.