Publication | Closed Access
Intelligent thermal vacuum sensors based on multipurpose thermopile MEMS chips
27
Citations
19
References
2013
Year
Electrical EngineeringEngineeringSensorsMicrofabricationThermal ManagementThermodynamicsSensor DesignInstrumentationHeat TransferMicroelectronicsThermal EngineeringThermal SensorSensor TechnologyMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1