Electrochemistry of anodic etching of 4H and 6H–SiC in fluoride solution of pH 3 - Concepedia

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Electrochemistry of anodic etching of 4H and 6H–SiC in fluoride solution of pH 3

45

Citations

43

References

2009

Year

Dennis H. van Dorp, Jesper J. H. B. Sättler, J.H. den Otter, John J. Kelly

Electrochimica Acta

Materials ScienceChemical EngineeringEngineeringSurface ScienceFluoride SolutionPlasma EtchingChemistryAnodic EtchingPh 3Electrochemistry

References

	Year	Citations

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