Quantitative electron probe microanalysis of carbon in binary carbides

Abstract

Introductory investigations performed in order to make quantitative electron-probe microanalysis of very light elements such as boron, carbon, nitrogen or oxygen possible are described. The practical problems encountered in this kind of work are discussed in detail and, where possible, solutions are proposed. It is shown that with very light elements such as carbon it is no longer permitted to measure x-ray intensities at the position of the maximum of the emission peak as the shape of the carbon Ka peak is subject to strong alterations, depending on the type of chemical bond involved. As a consequence, integral measurements have to be performed and it is shown that errors of 3040% can easily be made if this is neglected. The lengthy procedures, connected with integral intensity measurements, can be shortened considerably by the