9.2: Sequential Lateral Solidification (SLS) Process for Large Area AMOLED

Abstract

Abstract We have demonstrated that the sequential lateral solidification (SLS) technology can be utilized for the large area AMOLED. An optimized SLS process provides us with polycrystalline Si films with well‐controlled grain size and location. The thin film transistors (TFTs) with SLS‐processed Si films show high performance with desirable uniformity. 14″ WXGA (1280×RGB×768) AMOLEDs were fabricated with SLS‐processed TFT backplanes. We utilized RGB evaporation process with fine metal mask. The novel delta pixel arrangement results in increased aperture ratio and wider FMM process window. The advantage of SLS process will be discussed.