Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler - Concepedia

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Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler

477

Citations

19

References

1995

Year

Chin Y. Poon, Bharat Bhushan

EngineeringMicrofabricationOptical PropertiesCalibrationMechanical EngineeringSurface Roughness MeasurementsOptical TestingContact MechanicStylus ProfilerNon-contact Optical ProfilerInstrumentationQuality MetricsSurface MetrologySurface Processing

References

	Year	Citations

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