Publication | Closed Access
Plastic Deformation of Thin Foil Substrates with Amorphous Silicon Islands into Spherical Shapes
20
Citations
3
References
2000
Year
Materials ScienceEngineeringMicrofabricationSilicon On InsulatorApplied PhysicsSemiconductor Device FabricationThin FoilPlasticityElectronic PackagingAmorphous SolidThin Film ProcessingAmorphous Silicon IslandsPlastic Deformation
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