An electro-thermal model for metal-oxide-metal antifuses

Abstract

In this paper, a complete electro-thermal analysis is presented for the metal-oxide-metal antifuses. The application of the Wiedemann-Franz Law and the thin film effect on thermal and electrical conductivities of metal films were also discussed. Several key parameters for tungsten-oxide-tungsten antifuse were extracted. The reaction temperature between tungsten and oxide was estimated to be around 1300/spl deg/C. The core resistivity was found to be around 250 /spl mu//spl Omega//spl middot/cm. This model can be readily extended to the other metal-dielectric-metal systems.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>